The map for producing DEM at provincial scale include mountains, plains, hills and crossing different projection zones, the data are very large, so careful preparation of data are needed to produce eligible DEM. Approaches of error control and some detailed methods are summarized in the paper. Key technique of finding errors and methods of establishing DEM of Jiangsu Province are introduced by using ARCINFO and ARCVIEW software. Results show that using the technique can quickly find errors in vector data. High precise DEM can be achieved by this method. The technique and method are feasible to establish eligible DEM for large areas at provincial scale. And the DEM established by this method is more suitable to apply in monitoring soil and water losses than other methods.