Abstract: The changes of the whole industry by meanings of a series of input and output targets were analyzed in the paper. Fifteen industries with high agglomeration level were selected as subjects of study. According to the relationship between profit and scale indices of input production factors, the main result was found that some manufacturing industries’agglomeration became much more excessive in southeast beaboard China, there were surplus input and output deficit on combination of factors on the progress of spatial agglomeration of manufacturing industries. The result of Data Envelopment Analysis (DEA)on slack variable showed that when there was a decrease in input factor or an advance in combination of factors, the cost of product could be cut down and the efficiency could be improved by increasing productivity in order to achieve a rational distribution. As a result, the manufacturing industries can be divided into excessive agglomeration industry, appropriate agglomeration industry and promising agglomeration industry. By means of DEA, the excessive agglomeration areas were fund out. The result of the analysis of slack variable can do some help to make policy of tabling the agglomeration suitability of manufacturing industries and rationalization of industry in those excessive agglomeration industry areas.